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A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors
A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors
A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors
Qian, R.R. (Autor:in) / Wen, Z.Y. (Autor:in) / Chen, L. (Autor:in)
KEY ENGINEERING MATERIALS ; 483 ; 437-442
01.01.2011
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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