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    A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors

    New search for: Qian, R.R.
    New search for: Wen, Z.Y.
    New search for: Chen, L.

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    A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors

    New search for: Qian, R.R.
    New search for: Wen, Z.Y.
    New search for: Chen, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors

    New search for: Qian, R.R.
    New search for: Wen, Z.Y.
    New search for: Chen, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors

    Contributors:

    Qian, R.R. (author) / Wen, Z.Y. (author) / Chen, L. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 483 ; 437-442

    Publication date:

    2011-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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