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The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
Ma, H.G. (Autor:in) / Zhang, W.D. (Autor:in) / Ding, E.J. (Autor:in)
KEY ENGINEERING MATERIALS ; 483 ; 775-778
01.01.2011
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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