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The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
Ma, H.G. (author) / Zhang, W.D. (author) / Ding, E.J. (author)
KEY ENGINEERING MATERIALS ; 483 ; 775-778
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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