In Vitro Bioactivity of Atomic Layer Deposited Titanium Dioxide on Titanium and Silicon Substrates

Heinrichs, J. / Jarmar, T. / Rooth, M. et al. | British Library Online Contents | 2008

Structural properties of the titanium dioxide thin films grown by atomic layer deposition at various numbers of reaction cycles

Alekhin, A. P. / Gudkova, S. A. / Markeev, A. M. et al. | British Library Online Contents | 2010

Titanium isopropoxide as a precursor for atomic layer deposition: characterization of titanium dioxide growth process

Aarik, J. / Aidla, A. / Uustare, T. et al. | British Library Online Contents | 2000

Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

Berdova, Maria / Wiemer, Claudia / Lamperti, Alessio et al. | British Library Online Contents | 2016

Structural properties of Al2O3 dielectrics grown on TiN metal substrates by atomic layer deposition

Hsieh, C. I. / Pan, T. M. / Lin, J. C. et al. | British Library Online Contents | 2009