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Ion beam nanoscale fabrication and lithography-A review
Ion beam nanoscale fabrication and lithography-A review
Ion beam nanoscale fabrication and lithography-A review
Baglin, J. E. (Autor:in)
APPLIED SURFACE SCIENCE ; 258 ; 4103-4111
01.01.2012
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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