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Ion beam nanoscale fabrication and lithography-A review

Baglin, J. E.

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Ion beam nanoscale fabrication and lithography-A review

Baglin, J. E.

Ion beam nanoscale fabrication and lithography-A review

Baglin, J. E.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Ion beam nanoscale fabrication and lithography-A review

Contributors:

Baglin, J. E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 4103-4111

Publication date:

2012-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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