Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application
Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application
Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application
Anzalone, R. (Autor:in) / D Arrigo, G. (Autor:in) / Camarda, M. (Autor:in) / Piluso, N. (Autor:in) / Severino, A. (Autor:in) / La Via, F. (Autor:in) / Alquier, D.
01.01.2012
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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