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    Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application

    New search for: Anzalone, R.
    New search for: D Arrigo, G.
    New search for: Camarda, M.
    New search for: Piluso, N.
    New search for: Severino, A.
    New search for: La Via, F.
    New search for: Alquier, D.

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    Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application

    New search for: Anzalone, R.
    New search for: D Arrigo, G.
    New search for: Camarda, M.
    New search for: Piluso, N.
    New search for: Severino, A.
    New search for: La Via, F.
    New search for: Alquier, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application

    New search for: Anzalone, R.
    New search for: D Arrigo, G.
    New search for: Camarda, M.
    New search for: Piluso, N.
    New search for: Severino, A.
    New search for: La Via, F.
    New search for: Alquier, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application

    Contributors:

    Anzalone, R. (author) / D Arrigo, G. (author) / Camarda, M. (author) / Piluso, N. (author) / Severino, A. (author) / La Via, F. (author) / Alquier, D.

    Published in:

    HeteroSiC & WASMPE 2011 ; 51-54

    MATERIALS SCIENCE FORUM ; 711

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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