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Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography
Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography
Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography
Byun, I. (Autor:in) / Park, J.H. (Autor:in) / Kim, J.W. (Autor:in) / Kim, B.J. (Autor:in)
KEY ENGINEERING MATERIALS ; 516 ; 25-29
01.01.2012
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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