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Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography
Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography
Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography
Byun, I. (author) / Park, J.H. (author) / Kim, J.W. (author) / Kim, B.J. (author)
KEY ENGINEERING MATERIALS ; 516 ; 25-29
2012-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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