Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser: Fid-Bau Portal

Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

Hirano, T. / Okamoto, Y. / Okada, A. / Uno, Y. / Sakagawa, T. / Nakashiba, S.

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Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

Hirano, T. / Okamoto, Y. / Okada, A. / Uno, Y. / Sakagawa, T. / Nakashiba, S.

Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

Hirano, T. / Okamoto, Y. / Okada, A. / Uno, Y. / Sakagawa, T. / Nakashiba, S.

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Titel:

Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

Beteiligte:

Hirano, T. (Autor:in) / Okamoto, Y. (Autor:in) / Okada, A. (Autor:in) / Uno, Y. (Autor:in) / Sakagawa, T. (Autor:in) / Nakashiba, S. (Autor:in)

Erschienen in:

KEY ENGINEERING MATERIALS ; 516 ; 36-41

Erscheinungsdatum:

01.01.2012

Format / Umfang:

6 pages

ISSN:

1013-9826

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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