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    Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

    New search for: Hirano, T.
    New search for: Okamoto, Y.
    New search for: Okada, A.
    New search for: Uno, Y.
    New search for: Sakagawa, T.
    New search for: Nakashiba, S.

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    Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

    New search for: Hirano, T.
    New search for: Okamoto, Y.
    New search for: Okada, A.
    New search for: Uno, Y.
    New search for: Sakagawa, T.
    New search for: Nakashiba, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

    New search for: Hirano, T.
    New search for: Okamoto, Y.
    New search for: Okada, A.
    New search for: Uno, Y.
    New search for: Sakagawa, T.
    New search for: Nakashiba, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

    Contributors:

    Hirano, T. (author) / Okamoto, Y. (author) / Okada, A. (author) / Uno, Y. (author) / Sakagawa, T. (author) / Nakashiba, S. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 516 ; 36-41

    Publication date:

    2012-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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