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Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration

Li, Y.G. / Wu, Y.B. / Zhou, L.B. / Guo, H.R. / Cao, J.G. / Fujimoto, M. / Kemmochi, M.

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Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration

Li, Y.G. / Wu, Y.B. / Zhou, L.B. / Guo, H.R. / Cao, J.G. / Fujimoto, M. / Kemmochi, M.

Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration

Li, Y.G. / Wu, Y.B. / Zhou, L.B. / Guo, H.R. / Cao, J.G. / Fujimoto, M. / Kemmochi, M.

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Titel:

Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration

Beteiligte:

Li, Y.G. (Autor:in) / Wu, Y.B. (Autor:in) / Zhou, L.B. (Autor:in) / Guo, H.R. (Autor:in) / Cao, J.G. (Autor:in) / Fujimoto, M. (Autor:in) / Kemmochi, M. (Autor:in)

Erschienen in:

KEY ENGINEERING MATERIALS ; 523/524 ; 155-160

Erscheinungsdatum:

01.01.2012

Format / Umfang:

6 pages

ISSN:

1013-9826

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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