Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration: Fid-Bau Portal

Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration

Li, Y.G. / Wu, Y.B. / Zhou, L.B. / Guo, H.R. / Cao, J.G. / Fujimoto, M. / Kemmochi, M.

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Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration

Li, Y.G. / Wu, Y.B. / Zhou, L.B. / Guo, H.R. / Cao, J.G. / Fujimoto, M. / Kemmochi, M.

Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration

Li, Y.G. / Wu, Y.B. / Zhou, L.B. / Guo, H.R. / Cao, J.G. / Fujimoto, M. / Kemmochi, M.

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Title:

Investigation into Chemo-Mechanical Fixed Abrasive Polishing of Fused Silica with the Assistance of Ultrasonic Vibration

Contributors:

Li, Y.G. (author) / Wu, Y.B. (author) / Zhou, L.B. (author) / Guo, H.R. (author) / Cao, J.G. (author) / Fujimoto, M. (author) / Kemmochi, M. (author)

Published in:

KEY ENGINEERING MATERIALS ; 523/524 ; 155-160

Publication date:

2012-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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