Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Fabrication of Micro-Capacitive Inclination Sensor Using the LIGA Process
Fabrication of Micro-Capacitive Inclination Sensor Using the LIGA Process
Fabrication of Micro-Capacitive Inclination Sensor Using the LIGA Process
Kuboyama, Y. (Autor:in) / Nishida, S. (Autor:in) / Noda, D. (Autor:in) / Hattori, T. (Autor:in)
KEY ENGINEERING MATERIALS ; 523/524 ; 592-597
01.01.2012
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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