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    Fabrication of Micro-Capacitive Inclination Sensor Using the LIGA Process

    New search for: Kuboyama, Y.
    New search for: Nishida, S.
    New search for: Noda, D.
    New search for: Hattori, T.

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    Fabrication of Micro-Capacitive Inclination Sensor Using the LIGA Process

    New search for: Kuboyama, Y.
    New search for: Nishida, S.
    New search for: Noda, D.
    New search for: Hattori, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication of Micro-Capacitive Inclination Sensor Using the LIGA Process

    New search for: Kuboyama, Y.
    New search for: Nishida, S.
    New search for: Noda, D.
    New search for: Hattori, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Fabrication of Micro-Capacitive Inclination Sensor Using the LIGA Process

    Contributors:

    Kuboyama, Y. (author) / Nishida, S. (author) / Noda, D. (author) / Hattori, T. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 523/524 ; 592-597

    Publication date:

    2012-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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