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Comparative Study on Dry Etching of alpha - and beta -SiC Nano-Pillars
Comparative Study on Dry Etching of alpha - and beta -SiC Nano-Pillars
Comparative Study on Dry Etching of alpha - and beta -SiC Nano-Pillars
Choi, J.H. (Autor:in) / Latu-Romain, L. (Autor:in) / Bano, E. (Autor:in) / Henry, A. (Autor:in) / Lee, W.J. (Autor:in) / Chevolleau, T. (Autor:in) / Baron, T. (Autor:in) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A.
01.01.2013
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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Comparative study on dry etching of α- and β-SiC nano-pillars
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