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Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates
Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates
Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates
Kim, H. M. (Autor:in) / Manivannan, R. (Autor:in) / Moon, D. J. (Autor:in) / Xiong, H. (Autor:in) / Park, J. G. (Autor:in)
WEAR -LAUSANNE- ; 302 ; 1340-1344
01.01.2013
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11292
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