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Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates
Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates
Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates
Kim, H. M. (author) / Manivannan, R. (author) / Moon, D. J. (author) / Xiong, H. (author) / Park, J. G. (author)
WEAR -LAUSANNE- ; 302 ; 1340-1344
2013-01-01
5 pages
Article (Journal)
English
DDC:
620.11292
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