Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The Oxygen Plasma Dry Release Process of the Membrane Bridge of RF MEMS Switches
The Oxygen Plasma Dry Release Process of the Membrane Bridge of RF MEMS Switches
The Oxygen Plasma Dry Release Process of the Membrane Bridge of RF MEMS Switches
Jiang, L.L. (Autor:in) / Jia, S.X. (Autor:in) / Zhu, J. (Autor:in) / Tang, F.
01.01.2013
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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