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Structure and properties of TiAlLaN films deposited at various bias voltages
Structure and properties of TiAlLaN films deposited at various bias voltages
Structure and properties of TiAlLaN films deposited at various bias voltages
APPLIED SURFACE SCIENCE ; 292 ; 688-694
01.01.2014
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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