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Electrical, optical and micro-structural properties of ultra-thin HfTiON films
Electrical, optical and micro-structural properties of ultra-thin HfTiON films
Electrical, optical and micro-structural properties of ultra-thin HfTiON films
APPLIED SURFACE SCIENCE ; 295 ; 58-65
01.01.2014
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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