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A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output
A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output
A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output
Luo, Z.Y. (Autor:in) / Chen, D.Y. (Autor:in) / Wang, J.B. (Autor:in) / Tang, F.
01.01.2014
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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