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A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output
A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output
A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output
Luo, Z.Y. (author) / Chen, D.Y. (author) / Wang, J.B. (author) / Tang, F.
2014-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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