Fabrication of piezoelectric thick films for development of micromechanical cantilevers

Kwon, T. / Shin, K. S. / Hyung, M. et al. | British Library Online Contents | 2015

Photosensitive PZT gel films and their preparation for fine patterning

Weihua, Z. / Gaoyang, Z. / Zhiming, C. | British Library Online Contents | 2003

Enhanced dielectric and piezoelectric properties of low-temperature processed Pb(Zr,Ti)O3 thick films prepared by hybrid deposition technique with chemical solution infiltration process

Kim, S. H. / Koo, C. Y. / Lee, J. et al. | British Library Online Contents | 2011

Fabrication of microlens in photosensitive hybrid sol-gel films using a gray scale mask

Jiang, H. / Yuan, X. / Yun, Z. et al. | British Library Online Contents | 2001

Photosensitive sol-gel preparation and direct micro-patterning of c-oriented ZnO film

Yuanqing, C. / Fuxue, Y. / Gaoyang, Z. et al. | British Library Online Contents | 2011