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Fabrication of piezoelectric thick films for development of micromechanical cantilevers
Fabrication of piezoelectric thick films for development of micromechanical cantilevers
Fabrication of piezoelectric thick films for development of micromechanical cantilevers
Kwon, T. (Autor:in) / Shin, K. S. (Autor:in) / Hyung, M. (Autor:in) / Eom, K. (Autor:in) / Kim, T. S. (Autor:in)
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 29 ; 3351-3356
01.01.2015
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621
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