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Optimization of silver-assisted nano-pillar etching process in silicon
Optimization of silver-assisted nano-pillar etching process in silicon
Optimization of silver-assisted nano-pillar etching process in silicon
Azhari, A. W. (Autor:in) / Sopian, K. (Autor:in) / Desa, M. K. (Autor:in) / Zaidi, S. H. (Autor:in)
APPLIED SURFACE SCIENCE ; 357 ; 1863-1877
01.01.2015
15 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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