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Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

Mehran, M. / Sanaee, Z. / Mohajerzadeh, S. / Materials Research Society

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Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

Mehran, M. / Sanaee, Z. / Mohajerzadeh, S. / Materials Research Society

Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

Mehran, M. / Sanaee, Z. / Mohajerzadeh, S. / Materials Research Society

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Titel:

Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

Beteiligte:

Mehran, M. (Autor:in) / Sanaee, Z. (Autor:in) / Mohajerzadeh, S. (Autor:in) / Riel, Heike / Materials Research Society

Kongress:

MRS spring meeting; Low-dimensional functional nanostructures - fabrication, characterization and applications: symposium / ; 2010 ; San Francisco, CA

Erschienen in:

MRS spring meeting; Low-dimensional functional nanostructures - fabrication, characterization and applications: symposium / ; 133-142

MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS ; 1258

Erscheinungsdatum:

01.01.2010

Format / Umfang:

10 pages

Anmerkungen:

Includes bibliographical references and indexes.

ISBN:

9781605112350

ISSN:

0272-9172

Medientyp:

Aufsatz (Konferenz)

Format:

Sprache:

Englisch

Schlagwörter:

Low-dimensional functional nanostructures , Materials research , MRS

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