Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films: Fid-Bau Portal

Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films

Pugalenthi, A.S. / Balasundaraprabhu, R. / Gunasekaran, V. / Muthukumarasamy, N. / Prasanna, S. / Jayakumar, S.

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Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films

Pugalenthi, A.S. / Balasundaraprabhu, R. / Gunasekaran, V. / Muthukumarasamy, N. / Prasanna, S. / Jayakumar, S.

Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films

Pugalenthi, A.S. / Balasundaraprabhu, R. / Gunasekaran, V. / Muthukumarasamy, N. / Prasanna, S. / Jayakumar, S.

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Titel:

Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films

Beteiligte:

Pugalenthi, A.S. (Autor:in) / Balasundaraprabhu, R. (Autor:in) / Gunasekaran, V. (Autor:in) / Muthukumarasamy, N. (Autor:in) / Prasanna, S. (Autor:in) / Jayakumar, S. (Autor:in)

Erschienen in:

Materials science in semiconductor processing ; 29 ; 176-182

Erscheinungsdatum:

01.01.2015

Format / Umfang:

7 pages

ISSN:

1369-8001

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.38152

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