Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films: Fid-Bau Portal

Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films

Pugalenthi, A.S. / Balasundaraprabhu, R. / Gunasekaran, V. / Muthukumarasamy, N. / Prasanna, S. / Jayakumar, S.

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Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films

Pugalenthi, A.S. / Balasundaraprabhu, R. / Gunasekaran, V. / Muthukumarasamy, N. / Prasanna, S. / Jayakumar, S.

Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films

Pugalenthi, A.S. / Balasundaraprabhu, R. / Gunasekaran, V. / Muthukumarasamy, N. / Prasanna, S. / Jayakumar, S.

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Check availability in my library

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Document information

Title:

Effect of thickness on the structural, optical and electrical properties of RF magnetron sputtered GZO thin films

Contributors:

Pugalenthi, A.S. (author) / Balasundaraprabhu, R. (author) / Gunasekaran, V. (author) / Muthukumarasamy, N. (author) / Prasanna, S. (author) / Jayakumar, S. (author)

Published in:

Materials science in semiconductor processing ; 29 ; 176-182

Publication date:

2015-01-01

Size:

7 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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