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Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics
Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics
Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics
Caccamo, Sebastiano (Autor:in) / Puglisi, Rosaria A. (Autor:in) / Di Franco, Salvatore (Autor:in) / D’Urso, Luisa (Autor:in) / Indelicato, Valeria (Autor:in) / Italia, Markus (Autor:in) / Pannitteri, Salvatore (Autor:in) / La Magna, Antonino (Autor:in)
Materials science in semiconductor processing ; 42 ; 200-203
01.01.2016
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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