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Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics
Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics
Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics
Caccamo, Sebastiano (author) / Puglisi, Rosaria A. (author) / Di Franco, Salvatore (author) / D’Urso, Luisa (author) / Indelicato, Valeria (author) / Italia, Markus (author) / Pannitteri, Salvatore (author) / La Magna, Antonino (author)
Materials science in semiconductor processing ; 42 ; 200-203
2016-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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