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Core/shell structured sSiO2/mSiO2 composite particles: The effect of the core size on oxide chemical mechanical polishing
Core/shell structured sSiO2/mSiO2 composite particles: The effect of the core size on oxide chemical mechanical polishing
Core/shell structured sSiO2/mSiO2 composite particles: The effect of the core size on oxide chemical mechanical polishing
Chen, Yang (Autor:in) / Zuo, Changzhi (Autor:in) / Chen, Ailian (Autor:in)
Advanced powder technology ; 29 ; 18-26
01.01.2018
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.4305
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