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Core/shell structured sSiO2/mSiO2 composite particles: The effect of the core size on oxide chemical mechanical polishing
Core/shell structured sSiO2/mSiO2 composite particles: The effect of the core size on oxide chemical mechanical polishing
Core/shell structured sSiO2/mSiO2 composite particles: The effect of the core size on oxide chemical mechanical polishing
Chen, Yang (author) / Zuo, Changzhi (author) / Chen, Ailian (author)
Advanced powder technology ; 29 ; 18-26
2018-01-01
9 pages
Article (Journal)
English
DDC:
620.4305
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