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Investigation on sub nano-crystalline silicon thin films grown using pulsed PECVD process
Investigation on sub nano-crystalline silicon thin films grown using pulsed PECVD process
Investigation on sub nano-crystalline silicon thin films grown using pulsed PECVD process
Sharma, Mansi (Autor:in) / Chaudhary, Deepika (Autor:in) / Sudhakar, S. (Autor:in) / Jadkar, Sandesh (Autor:in) / Kumar, Sushil (Autor:in)
Materials science in semiconductor processing ; 80 ; 167-173
01.01.2018
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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