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Investigation on sub nano-crystalline silicon thin films grown using pulsed PECVD process
Investigation on sub nano-crystalline silicon thin films grown using pulsed PECVD process
Investigation on sub nano-crystalline silicon thin films grown using pulsed PECVD process
Sharma, Mansi (author) / Chaudhary, Deepika (author) / Sudhakar, S. (author) / Jadkar, Sandesh (author) / Kumar, Sushil (author)
Materials science in semiconductor processing ; 80 ; 167-173
2018-01-01
7 pages
Article (Journal)
English
DDC:
621.38152
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