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Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation
Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation
Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation
Lorenzoni, Matteo (Autor:in) / Wagner, Daniel (Autor:in) / Neuber, Christian (Autor:in) / Schmidt, Hans-Werner (Autor:in) / Perez-Murano, Francesc (Autor:in)
Applied surface science ; 442 ; 106-113
01.01.2018
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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