A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation
Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation
Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation
Lorenzoni, Matteo (author) / Wagner, Daniel (author) / Neuber, Christian (author) / Schmidt, Hans-Werner (author) / Perez-Murano, Francesc (author)
Applied surface science ; 442 ; 106-113
2018-01-01
8 pages
Article (Journal)
English
DDC:
620.44
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