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Low temperature wet etching to reveal sub-surface damage in sapphire substrates
Low temperature wet etching to reveal sub-surface damage in sapphire substrates
Low temperature wet etching to reveal sub-surface damage in sapphire substrates
Kumar, Purushottam (Autor:in) / Lee, Jinhyung (Autor:in) / Lee, Gwangwon (Autor:in) / Rao, Suhas (Autor:in) / Singh, Deepika (Autor:in) / Singh, Rajiv K. (Autor:in)
Applied surface science ; 273 ; 58-61
01.01.2013
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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