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193nm Excimer laser processing of Si/Ge/Si(100) micropatterns
193nm Excimer laser processing of Si/Ge/Si(100) micropatterns
193nm Excimer laser processing of Si/Ge/Si(100) micropatterns
Gontad, F. (Autor:in) / Conde, J.C. (Autor:in) / Chiussi, S. (Autor:in) / Serra, C. (Autor:in) / González, P. (Autor:in)
Applied surface science ; 362 ; 217-220
01.01.2016
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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