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Action mechanism of hydrogen gas on deposition of HfC coating using HfCl4-CH4-H2-Ar system
Action mechanism of hydrogen gas on deposition of HfC coating using HfCl4-CH4-H2-Ar system
Action mechanism of hydrogen gas on deposition of HfC coating using HfCl4-CH4-H2-Ar system
Wang, Yalei (Autor:in) / Li, Zehao (Autor:in) / Xiong, Xiang (Autor:in) / Li, Xiaobin (Autor:in) / Chen, Zhaoke (Autor:in) / Sun, Wei (Autor:in)
Applied surface science ; 390 ; 903-908
01.01.2016
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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