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Characterization of deep defects in boron-doped CVD diamond films using transient photocapacitance method
Characterization of deep defects in boron-doped CVD diamond films using transient photocapacitance method
Characterization of deep defects in boron-doped CVD diamond films using transient photocapacitance method
Maida, Osamu (Autor:in) / Hori, Takanori (Autor:in) / Kodama, Taishi (Autor:in) / Ito, Toshimichi (Autor:in)
Materials science in semiconductor processing ; 70 ; 203-206
01.01.2017
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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