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Depth resolution and preferential sputtering in depth profiling of sharp interfaces
Depth resolution and preferential sputtering in depth profiling of sharp interfaces
Depth resolution and preferential sputtering in depth profiling of sharp interfaces
Hofmann, S. (Autor:in) / Han, Y.S. (Autor:in) / Wang, J.Y. (Autor:in)
Applied surface science ; 410 ; 354-362
01.01.2017
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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