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UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
Delplanque, Aleksandra (Autor:in) / Henry, Etienne (Autor:in) / Lautru, Joseph (Autor:in) / Leh, Hervé (Autor:in) / Buckle, Malcolm (Autor:in) / Nogues, Claude (Autor:in)
Applied surface science ; 314 ; 280-285
01.01.2014
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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