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UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
Delplanque, Aleksandra (author) / Henry, Etienne (author) / Lautru, Joseph (author) / Leh, Hervé (author) / Buckle, Malcolm (author) / Nogues, Claude (author)
Applied surface science ; 314 ; 280-285
2014-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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