Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering: Fid-Bau Portal

Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Macías, H.A. / Yate, L. / Coy, L.E. / Olaya, J.J. / Aperador, W.

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Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Macías, H.A. / Yate, L. / Coy, L.E. / Olaya, J.J. / Aperador, W.

Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Macías, H.A. / Yate, L. / Coy, L.E. / Olaya, J.J. / Aperador, W.

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Zugriff über TIB

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Bestellung bei Subito €

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Titel:

Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Beteiligte:

Macías, H.A. (Autor:in) / Yate, L. (Autor:in) / Coy, L.E. (Autor:in) / Olaya, J.J. (Autor:in) / Aperador, W. (Autor:in)

Erschienen in:

Applied surface science ; 456 ; 445-456

Erscheinungsdatum:

01.01.2018

Format / Umfang:

12 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.44

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