Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering: Fid-Bau Portal

Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Macías, H.A. / Yate, L. / Coy, L.E. / Olaya, J.J. / Aperador, W.

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Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Macías, H.A. / Yate, L. / Coy, L.E. / Olaya, J.J. / Aperador, W.

Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Macías, H.A. / Yate, L. / Coy, L.E. / Olaya, J.J. / Aperador, W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering

Contributors:

Macías, H.A. (author) / Yate, L. (author) / Coy, L.E. (author) / Olaya, J.J. (author) / Aperador, W. (author)

Published in:

Applied surface science ; 456 ; 445-456

Publication date:

2018-01-01

Size:

12 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

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