Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Fabrication of octagonal and dodecagonal single crystal Si micropyramids via etching without using a pre-patterned mask
Fabrication of octagonal and dodecagonal single crystal Si micropyramids via etching without using a pre-patterned mask
Fabrication of octagonal and dodecagonal single crystal Si micropyramids via etching without using a pre-patterned mask
Deng, Haokun (Autor:in) / Hackney, Stephen A. (Autor:in) / Aifantis, Katerina E. (Autor:in)
Materials science in semiconductor processing ; 93 ; 36-43
01.01.2019
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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