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Fabrication of octagonal and dodecagonal single crystal Si micropyramids via etching without using a pre-patterned mask
Fabrication of octagonal and dodecagonal single crystal Si micropyramids via etching without using a pre-patterned mask
Fabrication of octagonal and dodecagonal single crystal Si micropyramids via etching without using a pre-patterned mask
Deng, Haokun (author) / Hackney, Stephen A. (author) / Aifantis, Katerina E. (author)
Materials science in semiconductor processing ; 93 ; 36-43
2019-01-01
8 pages
Article (Journal)
English
DDC:
621.38152
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